PURPOSE: To make the direct formation of fine projected and recessed patterns such as track grooves, information pits and the like on the peripheral wall of a cylindrical base material possible by a method wherein exposure is performed by irradiating it with light emitted from a light source with a certain beam width over the surface-polished peripheral wall, onto which resist is applied and a paper-like exposure mask is fixed, of the cylindrical base material under the state that the cylindrical base material is being rotated at constant speed.
CONSTITUTION: A cylindrical base material 4, the outer diameter of which is 300mm, which is made of cylindrical tool steel SKD 61 and the surface of which is plated electrolessly with nickel by the thickness of 100μm and, after that, polished, is employed. Photo-resist is applied onto the surface of the resultant cylindrical material by the thickness of 5,000. Next, in exposure process, exposure is performed through a cutting head 1 with laser beam 5 having the output power of 5W emitted from a laser oscillator 6 or concretely from the argon gas laser oscillator. The spot diameter of the laser beam 5 is about 0.5 - 1μm. The laser head 1 repeats scanning as indicated with the arrows at the speed of 50 - 200mm/sec under the state that the cylindrical base material 4, onto which the photo-resist is applied, is being rotated. The fixing of a paper-like exposure mask 2 is performed by chucking through vacuum port with a vacuum pump.
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SANTO TAKESHI
YOSHINO HITOSHI
