Title:
MANUFACTURE FOR SEMICONDUCTOR DEVICE HAVING DOUBLE BASE CONSTRUCTION
Document Type and Number:
Japanese Patent JPS5334479
Kind Code:
A
Abstract:
PURPOSE: To obtain the high speed IC with less number of masks, by diffusing the impurity deeper to the domain of external base with high concentration and shallower to the internal base domain with low concentration, and by forming the diffusion separating domain with one process simultaneously.
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Inventors:
SHINADA KAZUYOSHI
SHINOZAKI SATOSHI
KANAZAWA MAMORU
SHINOZAKI SATOSHI
KANAZAWA MAMORU
Application Number:
JP10931376A
Publication Date:
March 31, 1978
Filing Date:
September 11, 1976
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L29/73; H01L21/225; H01L21/331; H01L29/72; (IPC1-7): H01L21/225; H01L29/72