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Patent Searching and Data


Title:
MANUFACTURE OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH04242978
Kind Code:
A
Abstract:

PURPOSE: To obtain a method with which an adjustment can be done for each unit of a semiconductor wafer of semiconductor device.

CONSTITUTION: Semiconductor devices are formed on a semiconductor wafer, an adjustment resistor that adjusts the characteristics of the said semiconductor device is provide for each device on the semiconductor wafer, the pressure and temperature are changed by said each semiconductor wafer, the said adjustment resistor is adjusted with a fusing means while the characteristics are measured, the characteristics of the said semiconductor device are adjusted on the said semiconductor wafer, and, wafer the adjustment, the said semiconductor device is cut out by each piece. It is not necessary to regulate the semiconductor device with respect to temperature, making it possible to perform the process by each semiconductor wafer of the semiconductor device, with ease of adjustment process and possibility of further reduced size.


Inventors:
ARAKI TATSU
Application Number:
JP1145791A
Publication Date:
August 31, 1992
Filing Date:
January 08, 1991
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G01D3/028; G01L9/00; G01L27/00; H01L21/822; H01L27/04; H01L29/84; (IPC1-7): G01D3/04; G01L27/00; H01L27/04; H01L29/84
Attorney, Agent or Firm:
Miyazono Junichi