Title:
MANUFACTURE OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS60124951
Kind Code:
A
Abstract:
PURPOSE:To prevent the disconnection of Al wirings due to corrosion or oxidation by a method wherein an insulation fil or a conductive film coating conductor wirings is left only on both sides of the conductor wirings by anisotropic etching. CONSTITUTION:The Al wirings 2 are formed on a semiconductor substrate 1, and next a PSG (phospho-silicate glass) film 4 is adhered over the whole surface. Then, the film 4 is etched by anisotropic etching and thus left only side surfaces of the wirings 2. A PSG film 5 is adhered again over the whole surface. In such a manner, discontinuous lines do not appear on the film 5, and the wirings 2 are protected by complete coating and then prevented from oxidation.
Inventors:
ARAKI MITSUYOSHI
Application Number:
JP23458083A
Publication Date:
July 04, 1985
Filing Date:
December 12, 1983
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/3213; (IPC1-7): H01L21/88
Attorney, Agent or Firm:
Sadaichi Igita