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Title:
MANUFACTURE OF SEMICONDUCTOR AND RESIST APPLICATOR
Document Type and Number:
Japanese Patent JPH118174
Kind Code:
A
Abstract:

To provide a semiconductor manufacturing method and a resist applicator, where resist is well and stably applied onto a semiconductor wafer or the like even if the wafer has high hydrophobic properties.

This method comprises a process where resist is applied onto a semiconductor wafer, exposed to light, and developed into a resist pattern. At this point, the applied surface of the semiconductor wafer is subjected to a surface treatment with an alkaline processing solution such as a resist developing solution before resist is applied. This resist applicator which applies photoresist onto the semiconductor wafer when this semiconductor is manufactured is provided with a processing part 1 which enables the resist-coated surface of the semiconductor wafer undergo a surface treatment with an alkaline processing solution.


Inventors:
TOFUKU YOSHIAKI
Application Number:
JP15707297A
Publication Date:
January 12, 1999
Filing Date:
June 13, 1997
Export Citation:
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Assignee:
SONY CORP
International Classes:
G03F7/16; B05C11/08; H01L21/027; H01L21/304; (IPC1-7): H01L21/027; B05C11/08; G03F7/16; H01L21/304



 
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