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Title:
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE AND LIGHT-EMITTING DEVICE
Document Type and Number:
Japanese Patent JPH07273367
Kind Code:
A
Abstract:

PURPOSE: To provide a method for manufacturing a high quality semiconductor substrate which has no crack nor other problems and to provide a method for manufacturing a light-emitting device which has a high luminance and a high reliability using that semiconductor substrate.

CONSTITUTION: A buffer layer 2 is formed on a substrate for forming a semiconductor layer 1. By forming a mask 3 on parts of the surface of the buffer layer 2 with such material that no crystal would grow substantially on it, a plurality of exposed sections 21 are formed. Then, a semiconductor layer 4 is formed in the exposed sections 21. Regarding a method for manufacturing a light emitting device, a multilayer section which has a semiconductor active layer and a semiconductor clad layer is formed on the thus-obtained semiconductor substrate.


Inventors:
TADATOMO KAZUYUKI
OKAGAWA HIROAKI
WATABE SHINICHI
HIRAMATSU KAZUMASA
Application Number:
JP6514194A
Publication Date:
October 20, 1995
Filing Date:
April 01, 1994
Export Citation:
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Assignee:
MITSUBISHI CABLE IND LTD
International Classes:
H01L33/06; H01L33/12; H01L33/32; H01L33/34; H01L33/40; H01S5/00; H01S5/323; H01S5/343; (IPC1-7): H01L33/00; H01S3/18
Attorney, Agent or Firm:
Takashima Hajime



 
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