Title:
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
Document Type and Number:
Japanese Patent JPS58103150
Kind Code:
A
Abstract:
PURPOSE:To obtain the semiconductor substrate enabled to enlarge the throughput at the mask positioning process by a method wherein the mask positioning process is performed jumping over a semiconductor chip having pattern defects. CONSTITUTION:Existence of a marking formed by an ink jet on a chip is confirmed by a reflected image of light, and when the marking exists, because it shows existence of pattern inferiority, the process is advanced to the next chip, and when no marking exists, after the alignment operation and the exposure process are performed to the chip thereof, the process is advanced to the next chip, and the same processes are performed in order to the respective chips thereafter to complete the positioning process. After the development treatment is performed to the semiconductor substrate, an inspection is performed by a pattern tester, and the marking according to the ink jet is applied to the chip having pattern defectives. Then in the inspection process, detection of the marking is performed preceding the inspection of the electric characteristic, the process is advanced to the next chip when the marking exists, the inspection of the electric characteristic of the semiconductor device is performed when no marking exists, and a marking is applied newly when the device is defective. After then, in the assembling process, the inferiority markings applied to the respective chips of the semiconductor substrate in the mask positioning process are detected, and only the chips of acceptable quality are assembled.
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Inventors:
NAGANO KAZUTOSHI
OONAKA SEIJI
KAJIWARA KOUSEI
OONAKA SEIJI
KAJIWARA KOUSEI
Application Number:
JP20438481A
Publication Date:
June 20, 1983
Filing Date:
December 16, 1981
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/30; H01L21/027; H01L21/66; H01L23/544; (IPC1-7): H01L21/30; H01L21/66
Domestic Patent References:
| JPS53104168A | 1978-09-11 | |||
| JPS4845179A | 1973-06-28 | |||
| JPS53129587A | 1978-11-11 |
Attorney, Agent or Firm:
Toshio Nakao