To provide a method for manufacturing a high-quality stamper at a high yield by automated steps.
This method for manufacturing a stamper for an optical disc consists of a photosensitive layer forming step of forming a photosensitive layer after cleaning a substrate, a drying step of drying the photosensitive layer, a photosensitive step of performing photosensitization according to desired data, an electroconductive step of performing an electroconductive process of a surface by electroless plating, and a metal layer forming step of forming a nickel metal layer on an electroconductive surface using an electrocasting method. When performing these steps, under the electroconductive process, at least, the surface is treated with a negative charge neutralizing agent, then is treated with a tin-palladium treating agent, and further, is treated with a promoter to remove the tin component. After that, the surface is treated with an electroless nickel liquid. Every process in the electroconductive step represents a method for manufacturing a stamper for an optical disc using a spin coating process.
ICHIMURA IKUHISA
TSURUGA TETSUYA
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