PURPOSE: To manufacture a stamper for an optical disk of high accuracy and super durability by forming a bonding property increasing layer on a base, and then forming an etching layer.
CONSTITUTION: A bonding property increasing layer 2 contains at least one component constituting a base 1 and at least one component constituting an etching layer 3. In case a thin layer is provided between the base 1 and the bonding property increasing layer 2 for the purposes of strengthening bonding properties, at least one component constituting the thin layer and at least one component forming the etching layer should be contained in the bonding property increasing layer 2. For the formation of the bonding property increasing layer 2, the dry process such as sputtering, vacuum deposition, CVD can be utilized.
KUWANO ATSUSHI
YAMADA MITSUO
RIKUKAWA MASAHIRO
