Title:
MANUFACTURE OF TAB TAPE AND PHOTOMASK
Document Type and Number:
Japanese Patent JPH05144886
Kind Code:
A
Abstract:
PURPOSE: To provide the method of manufacturing a TAB tape, where troubles such as short circuits generated in a wiring pattern are eliminated by a method wherein protrudent parts located on both the ends of resist applied onto a copper foil which is formed in a TAB tape manufacturing process are fully removed in a development process.
CONSTITUTION: A process is provided in a TAB tape manufacturing process, where protrudent parts 5 located at both the ends of a photoresist 4 are selectively exposed to light, a wiring pattern 6 is most properly exposed to light, and the photoresist 4 is forcibly removed.
Inventors:
BABA MASAKI
Application Number:
JP33137791A
Publication Date:
June 11, 1993
Filing Date:
November 20, 1991
Export Citation:
Assignee:
SUMITOMO METAL MINING CO
International Classes:
H01L21/302; H01L21/027; H01L21/3065; H01L21/60; (IPC1-7): H01L21/027; H01L21/302; H01L21/60
Attorney, Agent or Firm:
Yoshihisa Oshida