PURPOSE: To form an adhesion strengthening layer in the interface between a substrate and a heater film so as to make it possible to use the present heater at high temperature and lower the dispersion of heating temperature and consumption of electric power as well by depositing materials for a heater film as well as sintering aid simultaneously on a smooth substrate by evaporation, patterning the thin film, and sintering the film.

CONSTITUTION: A heater thin film 2 mainly of a high melting point metal (material for a heater film 4) such as tungsten containing glass or glass with volatile organic material as a sintering aid is deposited on a smooth ceramic substrate 1. Then, after patterning the film into a prescribed heater pattern, sintering is carried out at proper temperature such as ≥1000°C. Not volatile components (glass components) in the sintering aid gather to the interface between the substrate and the film. The layer moderates shear stress produced between the substrate and the film and improves the adhesion strength having bonds between the substrate and the layer and between the layer and the film and as a result works as a adhesion strengthening layer 3. By this, consumption of electric power is decreased and the heater can be used at high temperature and the dispersion of heating temperature is also decreased.