Title:
MANUFACTURE OF WAVEGUIDE TYPE OPTICAL SWITCH
Document Type and Number:
Japanese Patent JPS6488403
Kind Code:
A
Abstract:
PURPOSE:To prevent the loss of waveguide light and to reduce the drift by forming a waveguide by a diffusion, and thereafter, bringing it to etching treatment, and forming a buffer layer thereon. CONSTITUTION:On a substrate 1 consisting of LiNbO3, etc., a substance 2 of Ti, etc. is diffused, and a waveguide 3 is formed. The surface of the substrate 1 on which the waveguide 3 has been formed is brought, for instance, to plasma dry etching by using gas of CF4, etc. On the substrate 1 which has been brought to etching, a buffer layer 4 consisting of SiO2, Al2O3, etc., is formed as a whole by spattering, PCVD, etc., and on this buffer layer 4, an electrode 5 is formed. In such a way, after the surface of the substrate 1 has been brought to etching, the buffer layer 4 is formed, therefore, the absorption of the waveguide light 3 can be decreased, and also, the generation of a drift can be prevented.
Inventors:
OKAYAMA HIDEAKI
MATOBA AKIHIRO
USHIKUBO TAKASHI
NAGAI KIYOSHI
MATOBA AKIHIRO
USHIKUBO TAKASHI
NAGAI KIYOSHI
Application Number:
JP24674987A
Publication Date:
April 03, 1989
Filing Date:
September 29, 1987
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
G02B6/12; G02B6/13; G02F1/03; G02F1/31; G02F1/313; (IPC1-7): G02B6/12; G02F1/03; G02F1/31
Attorney, Agent or Firm:
Maeda Minoru
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