To provide a manufacturing device of a functional element substrate for forming a high-quality, high-precision functional element group and a functional element substrate.

The manufacturing device is provided with a spray head unit 11 jetting solution containing a functional material, a substrate 14, a substrate positioning/retaining means 22 and an information inputting means inputting a liquid drop feeding information to the spray head unit 11. It is so structured that a certain distance is kept between a face of the substrate to form a functional element group on and a face of solution jet orifice of the spray head unit 11, and the substrate 14 and the spray head unit 11 make a relative movement in two directions crossing each other and parallel with the face to form the functional element group on. The spray head unit 11 jets solution on a required position of the substrate 14 according to the drop feeding information inputted by the information inputting means with action force due to mechanical displacement, and at the same time, spraying speed of the solution is so made to be higher than a relative movement speed of the substrate 14 and the spray head unit 11.