Title:
電子回路要素の製造装置および製造方法
Document Type and Number:
Japanese Patent JP6409211
Kind Code:
B2
Inventors:
Katsuhiko Suzuki
Application Number:
JP2013264331A
Publication Date:
October 24, 2018
Filing Date:
December 20, 2013
Export Citation:
Assignee:
National Institute of Technology
Miura Sensor Laboratory Co., Ltd.
Miura Sensor Laboratory Co., Ltd.
International Classes:
H01G13/00
Domestic Patent References:
| JP2012114171A | ||||
| JP2008528800A | ||||
| JP3084286B2 | ||||
| JP2002299462A | ||||
| JP3125469A | ||||
| JP2063106A |
Attorney, Agent or Firm:
Creation International Patent Office