Title:
MEMS素子の製造方法
Document Type and Number:
Japanese Patent JP2008544867
Kind Code:
A
Abstract:
The device (100) comprises a substrate (10) of a semiconductor material with a first and an opposite second surface (1,2) and a microelectromechanical (MEMS) element (50) which is provided with a fixed and a movable electrode (52, 51) that is present in a cavity (30). One of the electrodes (51,52) is defined in the substrate (10). The movable electrode (51) is movable towards and from the fixed electrode (52) between a first gapped position and a second position. The cavity (30) is opened through holes (18) in the substrate (10) that are exposed on the second surface (2) of the substrate (10). The cavity (30) has a height that is defined by at least one post (15) in the substrate (10), which laterally substantially surrounds the cavity (15).
Inventors:
Decker, Ronald
Runherreis, Hert
Paul Man, Haoke
Dumlink, Martin
Runherreis, Hert
Paul Man, Haoke
Dumlink, Martin
Application Number:
JP2008519068A
Publication Date:
December 11, 2008
Filing Date:
June 27, 2006
Export Citation:
Assignee:
Koninklijke Philips Electronics N.V.
International Classes:
B81C1/00; B81B3/00; H04R23/00; H04R31/00
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Shinsuke Onuki
Tadashige Ito