Title:
静電容量型電気機械変換装置の製造方法
Document Type and Number:
Japanese Patent JP5812625
Kind Code:
B2
Abstract:
Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess.
Inventors:
Kato Ayako
Kazutoshi Torashima
Yasuhiro Soeda
Shinichiro Watanabe
Kazutoshi Torashima
Yasuhiro Soeda
Shinichiro Watanabe
Application Number:
JP2011027966A
Publication Date:
November 17, 2015
Filing Date:
February 11, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R31/00; H04R19/00
Domestic Patent References:
| JP2009291514A |
Attorney, Agent or Firm:
Kazuo Kato