カーボンナノチューブの製造方法、並びにカーボンナノチューブ構造体を用いた素子、及び配線

Title:

カーボンナノチューブの製造方法、並びにカーボンナノチューブ構造体を用いた素子、及び配線

Document Type and Number:

Japanese Patent JP4670640

Kind Code:

B2

Abstract:

An amorphous carbon rod (13) is formed in contact with a catalyst fine particle (11). The fine particle (11) is liquefied by heat treatment, and moved along the amorphous carbon rod (13). The trail of the movement is converted to a carbon nanotube.

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Inventors:

Masahiko Ishida
Ichihashi
Yukinori Ochiai
Junichi Fujita

Application Number:

JP2005514399A

Publication Date:

April 13, 2011

Filing Date:

September 22, 2004

Export Citation:

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Assignee:

NEC

International Classes:

C01B31/02; B82B1/00; B82B3/00; H01L29/06; H01L51/30; H01L51/05

Domestic Patent References:

JP2003017508A	2003-01-17
JP2003238123A	2003-08-27

Attorney, Agent or Firm:

Shinji Hayami

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