Title:
紫外線センサのカソード電極の製造方法および紫外線センサ
Document Type and Number:
Japanese Patent JP6940323
Kind Code:
B2
Abstract:
To provide an ultraviolet sensor of a W electrode type which is hard to cause malfunction.SOLUTION: A tungsten material is rolled (step S101). The surface of the rolled tungsten material is sputtered, and this sputtering is continued until sputtered particles of tungsten cover the surface of the tungsten material (step S102). As a result, the plane orientation of the surface covered with the sputtered particles becomes (110), a work function can be increased, the critical sensitivity wavelength can be reduced, thereby being set to 240 nm or less.SELECTED DRAWING: Figure 1
Inventors:
Yuki Nakajima
Katagiri Sowa
Katagiri Sowa
Application Number:
JP2017147608A
Publication Date:
September 22, 2021
Filing Date:
July 31, 2017
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
H01J9/02; G01J1/02; H01J47/00
Domestic Patent References:
| JP2013019719A | ||||
| JP2019029199A | ||||
| JP2019020222A |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa