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Title:
化学機械研磨用水系分散体、化学機械研磨用水系分散体の製造方法および化学機械研磨方法
Document Type and Number:
Japanese Patent JP5288097
Kind Code:
B2
Inventors:
Kazuo Nishimoto
Tomotaka Shinoda
Application Number:
JP2008045637A
Publication Date:
September 11, 2013
Filing Date:
February 27, 2008
Export Citation:
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Assignee:
JSR CORPORATION
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
JP2005183684A
JP2003113370A
JP2003297780A
Foreign References:
WO2003005431A1
WO2006105020A1
Attorney, Agent or Firm:
Mitsue Obuchi
Yukio Fuse
Mitsufumi Matsumoto



 
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