Title:
エレクトレット基板の製造方法
Document Type and Number:
Japanese Patent JP6700139
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To equalize the charge of a charging layer of an electret substrate in a surface direction.SOLUTION: An electret substrate (50) constitutes a charging portion (14) of an electromechanical converter (1 or 2) that converts between electric power and mechanical power utilizing an electrostatic interaction between the charging portion and counter electrodes (15, 16). A method of manufacturing the electret substrate includes steps of: arranging a SiOlayer (52) and an electrode (54) serving as a negative electrode to face each other via an insulator (53), the SiOlayer being formed on the surface of a Si substrate (51) and containing a positive ion (K+ ion) of an alkali metal; and charging the SiOlayer by applying a voltage between the Si substrate and the electrode serving as a negative electrode while the Si substrate is used as a positive electrode.SELECTED DRAWING: Figure 1
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Inventors:
Izumi Yamamoto
Suzuki Masaya
Hashiguchi Hara
Suzuki Masaya
Hashiguchi Hara
Application Number:
JP2016151452A
Publication Date:
May 27, 2020
Filing Date:
August 01, 2016
Export Citation:
Assignee:
CITIZEN WATCH CO.,LTD.
International Classes:
H01G7/02
Domestic Patent References:
| JP2013013256A | ||||
| JP49113200A | ||||
| JP2014049557A | ||||
| JP2011223869A | ||||
| JP2017228584A | ||||
| JP2014107890A |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tomohiro Minamiyama
Koichi Itsubo
Ryoichi Hagiwara
Jun Tsuruta
Tomohiro Minamiyama
Koichi Itsubo
Ryoichi Hagiwara