Title:
MANUFACTURING METHOD OF ELECTRON EMISSION SOURCE
Document Type and Number:
Japanese Patent JP3878571
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron emission source capable of providing stable emission.
SOLUTION: After a coating 7 is formed by an electrodeposition method, a thermal CVD method or a spray method, the coating is irradiated with laser. Carbon nanotubes constituting the coating 7 are cut by the laser irradiation, and the density of the carbon nanotubes is optimized. By forming the coating 7 like that, stable emission can be provided from a cathode structure 5.
Inventors:
Junko Yotani
Sashiro Uemura
Hiroyuki Kurachi
Sashiro Uemura
Hiroyuki Kurachi
Application Number:
JP2003110299A
Publication Date:
February 07, 2007
Filing Date:
April 15, 2003
Export Citation:
Assignee:
Noritake Company Limited
International Classes:
C01B31/02; H01J9/02; C23C16/26; H01J1/304; H01J9/04; H01J9/12; H01J29/46; H01J31/12; H01J63/02; (IPC1-7): H01J9/02; C01B31/02; C23C16/26
Domestic Patent References:
| JP2001180920A | ||||
| JP2001057146A | ||||
| JP2001146409A |
Attorney, Agent or Firm:
Masaki Yamakawa
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