Title:
MANUFACTURING METHOD OF ELECTRON EMITTING UNIT, MANUFACTURING METHOD OF COLD CATHODE FIELD ELECTRON EMITTING ELEMENT, AND MANUFACTURING METHOD OF COLD CATHODE FIELD ELECTRON EMITTING DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP3828397
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a flat type cold cathode field electron emitting element that is capable of forming electron emitting units having uniform and well-controlled convex and concave parts.
SOLUTION: This is a manufacturing method of a cold cathode field electron emitting element that is comprised of a cathode electrode 11, an electron emitting part 15 that is composed of a plurality of electron emitting units 15A formed on the cathode electrode 11, and a gate electrode 13 that is arranged over the electron emitting part 15 and has an opening part 14A. The electron emitting units are formed by (A) a process for forming the base layer 21 on the cathode, (B) a process in which a convex-shape base layer 21 is left on a part of the cathode electrode by electrolyzing the base layer 21, and (C) a process in which an electron emitting layer 22 is formed on the cathode electrode 11 and on the base layer 21.
Inventors:
Ishiwata Mika
Shinichi Tachizono
Shinichi Tachizono
Application Number:
JP2001321863A
Publication Date:
October 04, 2006
Filing Date:
October 19, 2001
Export Citation:
Assignee:
ソニー株式会社
日立粉末冶金株式会社
日立粉末冶金株式会社
International Classes:
H01J9/02; H01J1/304; (IPC1-7): H01J9/02
Domestic Patent References:
| JP7262912A | ||||
| JP2000260298A | ||||
| JP869749A | ||||
| JP8306303A | ||||
| JP2000277004A |
Attorney, Agent or Firm:
Takahisa Yamamoto