電子増倍体の製造方法及び電子増倍体

Title:

電子増倍体の製造方法及び電子増倍体

Document Type and Number:

Japanese Patent JP6738244

Kind Code:

B2

Abstract:

An electron multiplier production method including a main body portion, and a channel provided in the main body portion to open at one end surface and the other end surface of the main body portion and emits secondary electrons includes a first step of preparing a main body member including the one end surface and the other end surface, a communicating hole for the channel through which the one end surface and the other end surface communicate being provided in the main body member, a second step of forming the channel by forming a deposition layer including at least a resistive layer on an outer surface of the main body member and an inner surface of the communicating hole using an atomic layer deposition method, and a third step of forming the main body portion by removing the deposition layer formed on the outer surface of the main body member.

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Inventors:

Hiroyuki Kobayashi
Sugiura Ginji

Application Number:

JP2016169809A

Publication Date:

August 12, 2020

Filing Date:

August 31, 2016

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