機能デバイスの製造方法

Title:

機能デバイスの製造方法

Document Type and Number:

Japanese Patent JP4035457

Kind Code:

B2

Abstract:

To provide a method of manufacturing a functional device formed by filling a functional material in a porous body.

The method of manufacturing the functional device has a process for preparing a structure containing a columnar member and an area enclosing the columnar member, a process for forming the porous body by removing the columnar member from the structure and a process for filling the functional material in the porous body. The columnar member containing and comprising a first material is enclosed by the area containing and comprising a second material, and the second material is contained at a rate of 20 atomic% or more and 70 atomic% or less to the total quantity of the first material and the second material in the structure. The first material is aluminum, and the second material is silicon or a mixture of silicon and germanium.

Inventors:

Nobuhiro Yasui
Kazuhiko Fukutani
Toru Tada

Application Number:

JP2003068509A

Publication Date:

January 23, 2008

Filing Date:

March 13, 2003

Export Citation:

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Assignee:

Canon Inc

International Classes:

B82B1/00; C23C14/06; B81C1/00; B82B3/00; C22C5/04; C22C19/00; C22C28/00; C22C38/00; C23C14/34; C23C14/58; C23C26/00; G11B5/65; G11B5/667; G11B5/738; G11B5/84; H01F10/16; H01L27/10; H01L29/06

Domestic Patent References:

JP9157062A
JP2139714A
JP2000327491A
JP7235034A
JP2001189010A
JP2001023140A
JP2001273622A

Foreign References:

WO2001071394A1

Other References:

N.E.Sluchanko, et. al.,Physical Review B,The American Physical Sciety,1996年,Vol. 53(17),11304~11306頁
M.Watanabe, et. al.,Applied Physics Letters,American Institute of Physics,2000年,Vol. 76(26),3971~3973頁
D.H.Ping, et al.,Journal of Applied Physics,American Institute of Physics,2001年,Vol.90(9),4708~4716頁

Attorney, Agent or Firm:

Tokuhiro Watanabe

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