Title:
MANUFACTURING METHOD OF HIGH-FREQUENCY PASSIVE COMPONENT
Document Type and Number:
Japanese Patent JP2020010179
Kind Code:
A
Abstract:
To provide a manufacturing method of a high-frequency passive component, capable of improving a manufacturing cost and a mass productivity.SOLUTION: A manufacturing method of a high-frequency passive component, having a substrate 35 formed by a dielectric body, and a side wall or a penetration electrode 45 formed in the substrate 35, comprises: a step of manufacturing an original mold having a concave part corresponding to the side wall or the penetration electrode 45 from a glass; a step of manufacturing a mold having a convex part corresponding to the concave part from a metal by using the original mold; a step of manufacturing the substrate 35 having the concave part corresponding to the convex part from a resin by using the mold; a step of polishing a surface 34 opposite to the side where the concave part 31 of the substrate 35 is opened to expose the concave part 31 to a surface 36 on the opposite side; and a step of forming a conductive layer 41 formed by the side wall or the penetration electrode 45 in the concave part 31 after it is exposed or was exposed to the surface 36 of the opposite side.SELECTED DRAWING: Figure 3
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Inventors:
NUKAGA OSAMU
Application Number:
JP2018129367A
Publication Date:
January 16, 2020
Filing Date:
July 06, 2018
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
H01P11/00; H01L23/15; H01P3/12; H05K3/00
Attorney, Agent or Firm:
Sumio Tanai
Mitsunaga Igarashi
Toshio Komuro
Yuichiro Shimizu
Mitsunaga Igarashi
Toshio Komuro
Yuichiro Shimizu