Title:
MANUFACTURING METHOD OF LAMINATE
Document Type and Number:
Japanese Patent JP2021182616
Kind Code:
A
Abstract:
To provide a manufacturing method of a laminate in which the adhesion between a copper foil and an insulating polymer is sufficiently ensured even when the surface roughness of a copper foil is small.SOLUTION: A manufacturing method of a laminate 13 in which a copper foil 10 and an insulating polymer 12 are laminated includes a step (A) of forming a copper diffusion barrier layer 11 on the surface of the copper foil by a sputtering method in a vacuum chamber, and a step (B) of laminating an insulating polymer on the copper foil having the copper diffusion barrier layer formed on its surface, and the step (A) includes a step of introducing water vapor into the vacuum chamber to form a hydroxide of a metal constituting the copper diffusion barrier layer on the surface of the copper diffusion barrier layer.SELECTED DRAWING: Figure 1
Inventors:
FUKUSHIMA KAZUHIRO
Application Number:
JP2020117466A
Publication Date:
November 25, 2021
Filing Date:
July 08, 2020
Export Citation:
Assignee:
PROMATIC KK
International Classes:
H05K3/38; B32B15/08; B32B37/00; C23C14/06; C23C14/34; H05K1/09
Attorney, Agent or Firm:
Maeda patent office
Previous Patent: JPWO2021182615
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