磁気抵抗効果素子の製造方法及び製造装置

Title:

磁気抵抗効果素子の製造方法及び製造装置

Document Type and Number:

Japanese Patent JPWO2007032379

Kind Code:

A

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Inventors:

Jayapura ウィラ David Di
Maebara Big tree
Kodaira 吉 3
Naoki Watanabe

Application Number:

JP2006318141W

Publication Date:

March 22, 2007

Filing Date:

September 13, 2006

Export Citation:

Assignee:

Canon ANELVA Corporation

International Classes:

H01L21/318; C23C14/06; H01L43/08; C23C14/34; H01L21/3065; H01L43/12

Attorney, Agent or Firm:

三山勝巳
加藤伸晃
岡部正夫
岡部讓
朝日伸光
臼井伸一
越智隆夫

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