To provide a method and apparatus for producing a sheet with a metal oxide thin film, wherein the film thickness and permeability in an end part in the sheet width direction are the same as those in a central part, without taking a countermeasure such as an enlargement of the width of an evaporation source even when there is a difference between the amounts of evaporated metal vapor in the sheet width direction.
The method for producing the sheet with a metal oxide thin film comprises allowing metal vapor to fly toward a sheet transferred while being brought into contact with the surface of a sheet guide in a reduced pressure atmosphere from an evaporation source obtained by melting a metal material, and at the same time, introducing oxygen into the metal vapor to continuously form the metal oxide thin film on the sheet. In the method, the oxygen is introduced into the metal vapor from a plurality of places having different heights in the sheet width direction.
COPYRIGHT: (C)2010,JPO&INPIT
Makoto Sato
Fumiho Nomura
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