Title:
測定装置、露光装置及びデバイスの製造方法
Document Type and Number:
Japanese Patent JP5538851
Kind Code:
B2
Abstract:
The present invention provides a measurement apparatus which measures an imaging performance of an optical system to be measured, the apparatus including a first reference substrate which is placed on an object plane of the optical system to be measured, and has periodic patterns arranged in accordance with a plurality of object heights, a second reference substrate which is placed on an image plane of the optical system to be measured, and has apertures which pass light from the periodic patterns, a detection unit configured to detect an intensity of the light which comes from the periodic patterns and has passed through the apertures, a driving unit configured to drive at least one of the first reference substrate and the second reference substrate, and a processing unit configured to perform a process for obtaining the imaging performance of the optical system to be measured.
Inventors:
Kuramoto Fukuyuki
Application Number:
JP2009279812A
Publication Date:
July 02, 2014
Filing Date:
December 09, 2009
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G01M11/02; G03F7/20
Domestic Patent References:
| JP2003197510A | ||||
| JP2002055435A | ||||
| JP2006324311A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu