Title:
微小コンデンサマイクロホンの製造方法
Document Type and Number:
Japanese Patent JP4950006
Kind Code:
B2
Abstract:
In the present invention, a plurality of condenser microphones is formed on a substrate. Then, charges are fixed to a dielectric film provided in each of the condenser microphones. After an amount of deposited charges of the dielectric film of each of the plurality of the condenser microphones is inspected by measuring capacitance of each condenser microphone while applying bias between the first electrode film thereof and the second electrode film thereof, the substrate is diced so that each of the condenser microphones is separated. Thus, at least the step of fixing charges is performed in a substrate state where the plurality of the condenser microphones is formed on the substrate. Therefore, the present invention contributes to enhancement of productivity in an assembly process of the condenser microphone and reduction in equipment costs.
Inventors:
Yoshiyuki Miyashita
Naoki Takahashi
Takashi Yamamoto
Shinichi Ichikawa
Naoki Takahashi
Takashi Yamamoto
Shinichi Ichikawa
Application Number:
JP2007295574A
Publication Date:
June 13, 2012
Filing Date:
November 14, 2007
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H04R19/01; H04R19/04; H04R31/00
Domestic Patent References:
| JP1188992A | ||||
| JP200347095A | ||||
| JP200739672A | ||||
| JP2008112755A |
Foreign References:
| WO2006132193A1 |
Attorney, Agent or Firm:
Toyoake Fukui