MANUFACTURING METHOD OF MICROCHANNEL DEVICE - DISCO ABRASIVE SYSTEMS LTD

Title:

MANUFACTURING METHOD OF MICROCHANNEL DEVICE

Document Type and Number:

Japanese Patent JP2017193014

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To change easily a channel structure of micro flow without wasting a substrate.SOLUTION: A manufacturing method of a microchannel device has a constitution having steps for: pasting one surface (16) of a die bonding film (13) onto a first substrate (11); forming a microchannel (15) on the die bonding film by irradiating the die bonding film with a laser beam; and laminating the first substrate and a second substrate together by pasting the second substrate (12) onto the other surface (17) of the die bonding film.SELECTED DRAWING: Figure 2

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Inventors:

TABATA SHIN
YOSHINO TOMOKI
NOMOTO TOMOTERU

Application Number:

JP2016084420A

Publication Date:

October 26, 2017

Filing Date:

April 20, 2016

Export Citation:

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Assignee:

DISCO ABRASIVE SYSTEMS LTD

International Classes:

B81C3/00; B01J19/00; G01N35/08; G01N37/00

Domestic Patent References:

JP2008194568A	2008-08-28
JP2004167607A	2004-06-17
JP2005031064A	2005-02-03
JP2006312044A	2006-11-16
JP2009501908A	2009-01-22

Attorney, Agent or Firm:

Hiroyoshi Aoki
Amada Masayuki

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