Title:
マイクロメカニカル素子の製造方法およびマイクロメカニカル素子
Document Type and Number:
Japanese Patent JP4971431
Kind Code:
B2
Abstract:
A method is provided for producing a micromechanical component and a micromechanical component is provided, particularly a microphone, a micro-loudspeaker or a pressure sensor (an absolute pressure sensor or a relative pressure sensor) having a substrate and having a diaphragm pattern, for the production of the diaphragm pattern, process steps being provided that are compatible only with a circuit that is monolithically integrated into or on the substrate, a sacrificial pattern applied onto the substrate being removed for the production of the diaphragm pattern.
Inventors:
Heli belt weber
Christoph Schelling
Roman shlosser
Christoph Schelling
Roman shlosser
Application Number:
JP2009510378A
Publication Date:
July 11, 2012
Filing Date:
April 03, 2007
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
H04R31/00; H04R19/02; H04R19/04
Domestic Patent References:
| JP2000022172A | ||||
| JP2005191208A | ||||
| JP2004356707A | ||||
| JP2005039652A |
Foreign References:
| DE10206711A1 |
Attorney, Agent or Firm:
Toshio Yano
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Hiroyasu Ninomiya
Einzel Felix-Reinhard