To provide a method of stably manufacturing organic electroluminescent element that enables a low voltage drive with higher electron injection efficiency.
A step of forming an electron injection layer in a manufacturing method of organic electroluminescent element includes the steps of: heating a dopant material by heating means of an evaporation source to make it in a gaseous state in an accommodating container; heating an intermediate lid by the heating means; causing the dopant material in the gaseous state to pass through an opening, while causing it to come into contact with the intermediate lid, and further causing it to pass from an opening of an upper lid to deposit on a substrate; and causing the organic compound to deposit on the substrate from the evaporation source of organic compound.
COPYRIGHT: (C)2009,JPO&INPIT
Toshiaki Yoshikawa
Naoto Fukuda
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Yoshihiro Yamaguchi