MANUFACTURING METHOD OF ORIENTED CERAMIC SINTERED BODY AND FLAT SHEET

Japanese Patent JP2019081704

A

To suppress deviation of a crystal orientation of a surface of an oriented ceramic sintered body from an inside crystal orientation.SOLUTION: A manufacturing method of an oriented ceramic sintered body includes (a) a process for manufacturing a ceramic molded body before firing to the oriented ceramic sintered body, and (b) a process for arranging the ceramic molded body in a hot press firing furnace with sandwiching the same with a pair of release sheets and hot press firing the ceramic molded body while pressing the same with a pair of punches via the pair of release sheets to obtain the oriented ceramic sintered body. The release sheets have maximum cross section height Pt of a cross section curve in a surface in an opposite side to a stainless steel sheet side after the release sheets are sandwiched with PET films having thickness of 75 μm and arithmetic average roughness Ra of a surface of 0.03 μm, then mounted on a stainless steel sheet having thickness of 10 mm and arithmetic average roughness Ra of a surface of 0.29 μm and packed under vacuum, and isostatic press is conducted at 200 kg/cmof 0.8 μm or less.SELECTED DRAWING: None

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JP7312712	Ceramic substrate, electrostatic chuck, manufacturing method of electrostatic chuck
WO/2007/110565	A METHOD OF SINTERING CERAMIC MATERIALS

WATANABE MORIMICHI
SATO KEI
MATSUSHIMA KIYOSHI
MAEDA TAKAHIRO
YOSHIKAWA JUN
NANATAKI TSUTOMU

JP2019031456A

May 30, 2019

February 25, 2019

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NGK INSULATORS LTD

C04B35/111; B28B3/00; C04B35/645

JP2007204299A	2007-08-16
JPH02279569A	1990-11-15

WO2008015952A1

2008-02-07

Aitec International Patent Office

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