Title:
研磨工具、光学素子の製造方法及び光学素子成形用金型の製造方法
Document Type and Number:
Japanese Patent JP5780719
Kind Code:
B2
Abstract:
Provided is a polishing tool capable of forming a high-quality surface of a workpiece in a short period of time. The polishing tool (10) comprises a rotation shaft (1) arranged parallel to a feed direction (S) of the polishing tool relative to a workpiece (W) and at least two polishing bodies (7,8). The first polishing body (8) includes a foamed resin such as a foamed polyurethane resin, and has an outer peripheral surface (8a) having a porosity higher than the porosity of the second polishing body (7). The second polishing body (7) comprises a non-foamed resin such as a non-foamed polyurethane resin being a material more rigid than the material used for the first polishing body (8). During polishing, the first polishing body (8) removes material from the surface (Wa) of the workpiece (W), and the second polishing body (7) smoothes an unevenness resulting from the material removal with the first polishing body (8).
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| JPS6026673 | 【発明の名称】ロ-ル状研磨材の自動整形装置 |
| JPH07108451 | POLISHING DEVICE |
Inventors:
Kenichi Masuyama
Application Number:
JP2010174549A
Publication Date:
September 16, 2015
Filing Date:
August 03, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
B24B41/04; B24B13/00; B24B45/00
Domestic Patent References:
| JP2002018689A | ||||
| JP2007250166A | ||||
| JP2003117841A |
Attorney, Agent or Firm:
Kazuo Chikajima
Takashi Daejeon
Takashi Daejeon