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Patent Searching and Data


Title:
MANUFACTURING METHOD OF PROBE, AND MANUFACTURING METHOD OF PROBE CARD
Document Type and Number:
Japanese Patent JP2009008450
Kind Code:
A
Abstract:

To provide a manufacturing method of a probe and a probe card capable of reducing manufacturing cost with a short manufacturing time, by manufacturing simultaneously a plurality of probes by a fine processing technology mainly composed of a metal processing technology, and by bonding the probe onto a substrate.

This manufacturing method of the probe constituted of a support part to be mounted onto the substrate, an arm part elongated from the support part and bent to have springiness, and a tip part provided on the tip of the arm part, to be brought into contact with an electrode of an inspection object includes a process for shaping a metal plate by a press work into a side face shape equivalent to the support part, the arm part and the tip part of the probe; and a process for forming a slit for dividing the metal plate into a plurality of probes, while remaining a part of the metal plate as a common connection part when forming the slit, and removing an excessive metal plate between adjacent probes. Hereby, the plurality of probes are manufactured in the connected state by the common connection part.


Inventors:
OKUBO MASAO
Application Number:
JP2007168108A
Publication Date:
January 15, 2009
Filing Date:
June 26, 2007
Export Citation:
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Assignee:
JAPAN ELECTRONIC MATERIALS
International Classes:
G01R1/073; H01L21/66
Attorney, Agent or Firm:
▲吉▼川 俊雄