Title:
シリコン単結晶引上げ用石英ガラスルツボの製造方法
Document Type and Number:
Japanese Patent JP3625636
Kind Code:
B2
Inventors:
Kozo Kitano
Hiroyuki Homma
Naoyuki Obata
Hiroyuki Homma
Naoyuki Obata
Application Number:
JP254898A
Publication Date:
March 02, 2005
Filing Date:
January 08, 1998
Export Citation:
Assignee:
Toshiba Ceramics Co., Ltd.
International Classes:
C03B20/00; C03B19/09; C30B15/10; C30B29/06; H01L21/208; (IPC1-7): C30B29/06; C03B20/00; C30B15/10
Domestic Patent References:
| JP5124889A | ||||
| JP5208838A | ||||
| JP8048532A | ||||
| JP8239231A | ||||
| JP1157427A | ||||
| JP1157428A | ||||
| JP9110579A | ||||
| JP9235134A | ||||
| JP9241030A | ||||
| JP2000103694A |
Attorney, Agent or Firm:
Hisashi Hatano
Shunguchi Sekiguchi
Shunguchi Sekiguchi