Title:
MANUFACTURING METHOD FOR REFLECTING MIRROR AND REFLECTING MIRROR MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2020202422
Kind Code:
A
Abstract:
To provide a manufacturing method for a reflecting mirror and a reflecting mirror manufacturing apparatus, which are capable of easily manufacturing a thin reflecting mirror having a reflective surface with high mirror surface accuracy.SOLUTION: A manufacturing method for a reflecting mirror includes: a measurement step (S10) of measuring the shape of a reflective surface of a reflecting mirror; a difference calculation step (S20) of finding a difference between the design shape of the reflective surface and the shape of the reflective surface measured; a position calculation step (S40) of finding a position where the reflective surface is processed based on the difference found; and a processing step (S50) of processing the found position, where the reflective surface is processed, with a depth smaller than the allowance of a difference between the depth of the design shape of the reflective surface and the depth of the measured reflective surface. In the manufacturing method, the measurement step (S10), the difference calculation step (S20), the position calculation step (S40) and the processing step (S50) are repeated.SELECTED DRAWING: Figure 3
Inventors:
TSUTSUI TOMOHIRO
NAKANO KENJI
NAKANO KENJI
Application Number:
JP2019105962A
Publication Date:
December 17, 2020
Filing Date:
June 06, 2019
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01P11/00; B24B19/00; B24B49/12; B24B49/16; H01Q15/16
Attorney, Agent or Firm:
Kimura Mitsuru
Koji Yashima
Mie Hideki
Koji Yashima
Mie Hideki