Title:
固体撮像素子の製造方法
Document Type and Number:
Japanese Patent JP6911353
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a solid state imaging device having micro lenses, the collection efficiency of which is improved by reducing crosstalk.SOLUTION: A solid state imaging device includes a semiconductor substrate 1, multiple photoelectric conversion elements 2 arranged in matrix on the surface of the semiconductor substrate 1, a planarization layer 3 formed on the photoelectric conversion elements 2, multiple color filters 4 formed on the planarization layer 3 while arranged in the same matrix as the photoelectric conversion elements 2, and multiple microlenses 5 formed, respectively, on the multiple color filters 4. Marginal parts of the multiple microlenses 5 are coupled in trough-shape next to each other, and the profile of the trough constituting a coupling part 5a, perpendicular to the semiconductor substrate surface, is V-shape in the first profile along the row of the matrix, in the second profile along the column of the matrix, and in the third profile of 45 degrees to the row and column.SELECTED DRAWING: Figure 2
Inventors:
Ryohei Gorai
Application Number:
JP2016256313A
Publication Date:
July 28, 2021
Filing Date:
December 28, 2016
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L27/146; G02B3/00
Domestic Patent References:
| JP2010066727A | ||||
| JP2012084608A | ||||
| JP2008016760A | ||||
| JP6174914A | ||||
| JP2014072208A | ||||
| JP2003172804A | ||||
| JP2015158663A | ||||
| JP2008130732A | ||||
| JP2016111184A | ||||
| JP2016219703A |
Foreign References:
| WO2011090115A1 | ||||
| WO2016190246A1 |
Attorney, Agent or Firm:
Ichi Hirose
Toru Miyasaka
Toru Miyasaka