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Title:
MANUFACTURING METHOD OF SOUND WAVE GENERATION DEVICE
Document Type and Number:
Japanese Patent JP2009219089
Kind Code:
A
Abstract:

To provide a manufacturing method of a sound wave generation device which can be formed so as to have a large area and to be inexpensive by deposition using application without limiting a substrate to silicon.

A fluid material including precursors which form nanocrystalline particles and heating elements are applied and deposited on a substrate, and after drying and heating, the sound wave generation device which emits ultrasonic waves is formed by photo-irradiation.


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Inventors:
ODAKAWA AKIHIRO
HASHIMOTO MASAHIKO
MORITA KIYOYUKI
Application Number:
JP2008063659A
Publication Date:
September 24, 2009
Filing Date:
March 13, 2008
Export Citation:
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Assignee:
PANASONIC CORP
International Classes:
H04R31/00; H04R23/00
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano



 
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