Title:
スピン起動トルクベースのスイッチング素子の製造方法
Document Type and Number:
Japanese Patent JP7081842
Kind Code:
B2
Abstract:
The present disclosure relates to a spin-orbit torque-based switching device and a method of fabricating the same. The spin-orbit torque-based switching device of the present disclosure includes a spin torque generating layer provided with a tungsten-vanadium alloy thin film exhibiting perpendicular magnetic anisotropy (PMA) characteristics and a magnetization free layer formed on the spin torque generating layer.
Inventors:
Kim Yongne
Application Number:
JP2020174818A
Publication Date:
June 07, 2022
Filing Date:
October 16, 2020
Export Citation:
Assignee:
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
International Classes:
H01L29/82; H01F10/30; H01F41/18; H01L21/8239; H01L27/105; H01L43/08
Domestic Patent References:
| JP2017059634A | ||||
| JP2004227621A |
Foreign References:
| US20170338021 | ||||
| US20190295615 | ||||
| WO2017208576A1 |
Attorney, Agent or Firm:
Ebisu International Patent Office, a patent business corporation