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Title:
MANUFACTURING METHOD OF SUBSTRATE MATERIAL FOR OPTICAL DEVICE
Document Type and Number:
Japanese Patent JP2014024153
Kind Code:
A
Abstract:

To provide a manufacturing method of a substrate material for an optical device, capable of forming the substrate material having a surface shape of relieving warping of the substrate material in a process of laminating a luminescent layer only by a grinding process by a grinder.

The manufacturing method of the substrate material for the optical device comprises: a first grinding process of flattening a surface Wa of a plate-like work W executed after adjusting a contact surface 3da in a grinding wheel 3d possessed by grinding means 3 and the surface Wa of the plate-like work W opposed to the contact surface 3da in parallel by an adjustment shaft 5 indicated from a first inclination indicating part 6a; and a second grinding process of forming a second grinding surface of a center recessed shape by grinding a new upper surface Wb of the plate-like work W by sending the grinding means 3 for grinding after setting so that the contact surface 3da of the grinding wheel 3d comes into contact with a central part earlier than with an outer peripheral part of the upper surface Wb by adjusting an inclination of the upper surface Wb of the plate-like work W after holding the flattened surface Wa by a holding surface 2a, by the adjustment shaft 5 indicated from a second inclination indicating part 6b.


Inventors:
KIKAWA YUKIKO
Application Number:
JP2012165822A
Publication Date:
February 06, 2014
Filing Date:
July 26, 2012
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B41/06; H01L21/304
Domestic Patent References:
JP2008238341A2008-10-09
JP2011233766A2011-11-17
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi