Title:
METHOD FOR MANUFACTURING SUCTION MEMBER, AND SUCTION MEMBER
Document Type and Number:
Japanese Patent JP2022086147
Kind Code:
A
Abstract:
To provide a suction member that can reduce attachment of particles to an object to be sucked and has relatively strong mechanical strength.SOLUTION: A method is for manufacturing a suction member comprising a base formed of a ceramic sintered body and a plurality of projections projecting from a surface of the base, and includes: a preparation step of preparing a plate-like body formed of a ceramic sintered body; a film production step of forming, on the plate-like body, a film formed of the same material as that of the plate-like body and finer than the plate-like body; a blast processing step of forming, through blast processing, a plurality of precursor projections higher than the thickness of the film; and a laser processing step of processing, through laser processing, side faces of the precursor projections to form the projections.SELECTED DRAWING: Figure 2
Inventors:
HARADA MASAHIRO
Application Number:
JP2020198003A
Publication Date:
June 09, 2022
Filing Date:
November 30, 2020
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01L21/683; B23K26/36; B23P15/00; B24C1/00; C04B41/87; C04B41/91
Attorney, Agent or Firm:
Beech International Patent Office
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