Title:
弾性表面波装置の製造方法
Document Type and Number:
Japanese Patent JP5258566
Kind Code:
B2
Abstract:
Provided is a method for manufacturing a surface acoustic wave apparatus that can reduce degradation of electric characteristics and also reduce the number of manufacturing processes. The method for manufacturing a surface acoustic wave apparatus includes the steps of: forming an IDT electrode on an upper surface of a piezoelectric substrate, forming a frame member surrounding a formation area in which the IDT electrode is formed on the piezoelectric substrate, and mounting a film-shaped lid member on the upper surface of the frame member so as to be joined to the frame member so that a protective cover, used for covering the formation area and for providing a tightly-closed space between it and the formation area, is formed.
Inventors:
Toru Fukano
Application Number:
JP2008528827A
Publication Date:
August 07, 2013
Filing Date:
August 07, 2007
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H03H3/08; H03H9/145; H03H9/25
Domestic Patent References:
| JPH10112624A | 1998-04-28 | |||
| JPH10270975A | 1998-10-09 | |||
| JPH10275811A | 1998-10-13 | |||
| JP2005038980A | 2005-02-10 | |||
| JP2004282707A | 2004-10-07 | |||
| JPH11150441A | 1999-06-02 | |||
| JPH11233691A | 1999-08-27 | |||
| JP2005295363A | 2005-10-20 | |||
| JP2006179972A | 2006-07-06 | |||
| JP2001308546A | 2001-11-02 | |||
| JP2005085898A | 2005-03-31 | |||
| JP2006101082A | 2006-04-13 | |||
| JPH10112624A | 1998-04-28 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
Previous Patent: BALANCE WHEEL SPRING FOR CLOCK AND METHOD OF MANUFACTURE THEREOF
Next Patent: JPS5258567
Next Patent: JPS5258567