Title:
熱音響装置の製造方法
Document Type and Number:
Japanese Patent JP5080621
Kind Code:
B2
Abstract:
The present invention relates to a thermoacoustic device that includes an acoustic element. The acoustic element includes a substrate, a plurality of microspaces, and a metal film. The metal film is located above the substrate. A plurality of microspaces is defined between the substrate and the metal film. The metal film is partially suspended above the substrate.
Inventors:
Liu Ryo
Table
Liu Kai
Falcon
Ginger
Han Moriyoshi
Table
Liu Kai
Falcon
Ginger
Han Moriyoshi
Application Number:
JP2010170533A
Publication Date:
November 21, 2012
Filing Date:
July 29, 2010
Export Citation:
Assignee:
Tsinghwa University
HON HAI PRECISION INDUSTRY CO.,LTD.
HON HAI PRECISION INDUSTRY CO.,LTD.
International Classes:
H04R23/00; H04R31/00
Domestic Patent References:
| JP2006217059A | ||||
| JP2003154312A | ||||
| JP7282961A | ||||
| JP61294786A |
Foreign References:
| WO2005120130A1 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro