Title:
薄膜コンデンサの製造方法
Document Type and Number:
Japanese Patent JP5375582
Kind Code:
B2
Inventors:
Yuko Saya
Kenji Horino
Yoshihiko Yano
Hitoshi Saida
Kenji Horino
Yoshihiko Yano
Hitoshi Saida
Application Number:
JP2009286511A
Publication Date:
December 25, 2013
Filing Date:
December 17, 2009
Export Citation:
Assignee:
tdk Corporation
International Classes:
H01G4/33; H01G4/12
Domestic Patent References:
| JP2007235024A | ||||
| JP2007266459A | ||||
| JP2006049563A | ||||
| JP2007329190A | ||||
| JP2007294937A |