Title:
薄膜構造体の製造方法
Document Type and Number:
Japanese Patent JPWO2003001608
Kind Code:
A
Inventors:
Makio Horikawa
Mika Okumura
Kiyoshi Ishibashi
Mika Okumura
Kiyoshi Ishibashi
Application Number:
JP2001005342W
Publication Date:
January 03, 2003
Filing Date:
June 21, 2001
Export Citation:
Assignee:
Mitsubishi Electric Corp.
International Classes:
(IPC1-7): B81C1/00; G01P15/125
Attorney, Agent or Firm:
Shigeaki Yoshida
Hidetoshi Yoshitake
Takahiro Arita
Hidetoshi Yoshitake
Takahiro Arita
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