Title:
トランスデューサ用基板の製造方法
Document Type and Number:
Japanese Patent JP5022198
Kind Code:
B2
Inventors:
Hiroshi Kawada
Naoki Ushiyama
Hiroshi Maruyama
Naoki Ushiyama
Hiroshi Maruyama
Application Number:
JP2007306585A
Publication Date:
September 12, 2012
Filing Date:
November 27, 2007
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/306; H01L29/84; H04R19/02; H04R19/04; H04R31/00
Domestic Patent References:
| JP6045617A | ||||
| JP2137273A | ||||
| JP2006214812A | ||||
| JP2004356707A | ||||
| JP63308390A | ||||
| JP9129897A | ||||
| JP5144800A |
Attorney, Agent or Firm:
Keisei Nishikawa