Title:
MANUFACTURING METHOD OF TRANSMISSIVE OPTICAL ELEMENT, EXPOSURE DEVICE, MANUFACTURING METHOD OF ARTICLE, AND TRANSMISSIVE OPTICAL ELEMENT
Document Type and Number:
Japanese Patent JP2022020087
Kind Code:
A
Abstract:
To provide a technique related to a transmissive optical element, which has an advantage in equalizing illuminance distribution on an illuminated surface.SOLUTION: A manufacturing method of a light transmissive optical element includes: a first step of forming an optical thin film on a surface of the optical element; and a second step of removing the optical thin film formed in the first step in its thickness direction. In the second step, the optical thin film is removed in its thickness direction in such a manner that at least a part of the optical thin film remains even in a region in which the optical thin film is to be removed.SELECTED DRAWING: Figure 2
Inventors:
TAKADA DAIKI
SUDA HIROMI
SUDA HIROMI
Application Number:
JP2020110820A
Publication Date:
February 01, 2022
Filing Date:
June 26, 2020
Export Citation:
Assignee:
CANON KK
International Classes:
G02B19/00; G02B1/11; G02B5/00; G03F7/20
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office