Title:
MANUFACTURING METHOD OF ULTRASONIC TRANSDUCER
Document Type and Number:
Japanese Patent JP2022038236
Kind Code:
A
Abstract:
To provide a manufacturing method of an ultrasonic transducer that can easily improve manufacturing efficiency and yield.SOLUTION: In an ultrasonic transducer, in a backing material mounting step, a backing material is placed on the support surface such that the surface of a backing material faces upward. In a piezoelectric member joining step, a piezoelectric member is joined to the surface of the backing material placed on the support surface via a joining material having fluidity. The back surface of the backing material which is located opposite to the front surface includes a contact surface portion that contacts the support surface during the backing material mounting step and a non-contact surface portion in which a space is interposed between the non-contact portion and the support surface during the backing material mounting step. In the piezoelectric member joining step, the joining material flows into the space between the non-contact surface portion and the support surface.SELECTED DRAWING: Figure 4
Inventors:
SATO KATSUYA
KOBAYASHI TAKEFUMI
TAKAHASHI TOSHIHIDE
YAMAMOTO TETSUYA
KOBAYASHI TAKEFUMI
TAKAHASHI TOSHIHIDE
YAMAMOTO TETSUYA
Application Number:
JP2020142622A
Publication Date:
March 10, 2022
Filing Date:
August 26, 2020
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA ENERGY SYSTEM & SOLUTION CORP
TOSHIBA ENERGY SYSTEM & SOLUTION CORP
International Classes:
H04R17/00; H01L41/09; H01L41/313; H04R31/00
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office